Analysis of Fringe Effect of MEMS Comb Capacitor with Slot Structures

	Analysis of Fringe Effect of MEMS Comb Capacitor with Slot Structures
	Dong, LX ; Huo, WH ; Yan, HX ; Sun, LL
刊名	INTEGRATED FERROELECTRICS
	2011
卷号	129 页码:122-132
关键词	TAYLOR & FRANCIS LTD
ISSN号	1058-4587
学科主题	Engineering, Electrical & Electronic; Physics, Applied; Physics, Condensed Matter
语种	英语
公开日期	2012-04-12
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/106915]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Dong, LX,Huo, WH,Yan, HX,et al. Analysis of Fringe Effect of MEMS Comb Capacitor with Slot Structures[J]. INTEGRATED FERROELECTRICS,2011,129:122-132.
APA	Dong, LX,Huo, WH,Yan, HX,&Sun, LL.(2011).Analysis of Fringe Effect of MEMS Comb Capacitor with Slot Structures.INTEGRATED FERROELECTRICS,129,122-132.
MLA	Dong, LX,et al."Analysis of Fringe Effect of MEMS Comb Capacitor with Slot Structures".INTEGRATED FERROELECTRICS 129(2011):122-132.