Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper

	Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper
	Zhang,L ; Wang,HB ; Zhang,ZF ; Qin,F ; Liu,WL ; Song,ZT
刊名	APPLIED SURFACE SCIENCE
	2011
卷号	258 期号:3 页码:1217-1224
关键词	ELSEVIER SCIENCE BV
ISSN号	0169-4332
学科主题	Chemistry ; Physical; Materials Science ; Coatings & Films; Physics ; Applied; Physics ; Condensed Matter
公开日期	2012-04-10
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/106817]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Zhang,L,Wang,HB,Zhang,ZF,et al. Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper[J]. APPLIED SURFACE SCIENCE,2011,258(3):1217-1224.
APA	Zhang,L,Wang,HB,Zhang,ZF,Qin,F,Liu,WL,&Song,ZT.(2011).Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper.APPLIED SURFACE SCIENCE,258(3),1217-1224.
MLA	Zhang,L,et al."Preparation of monodisperse polystyrene/silica core-shell nano-composite abrasive with controllable size and its chemical mechanical polishing performance on copper".APPLIED SURFACE SCIENCE 258.3(2011):1217-1224.