Compositional and structural studies of DC magnetron sputtered SiC films on Si(111)

	Compositional and structural studies of DC magnetron sputtered SiC films on Si(111)
	Lei,YM ; Yu,YH ; Ren,CX ; Zou,SC ; Chen,DH ; Wong,SP ; Wilson,IH
刊名	THIN SOLID FILMS
	2000
卷号	365 期号:1 页码:53-57
关键词	THIN-FILMS GROWTH DEVICES
ISSN号	0040-6090
通讯作者	Lei, YM, Acad Sinica, Shanghai Inst Met, Ion Beam Lab, 865 Changning Rd, Shanghai 200050, Peoples R China
学科主题	Materials Science ; Multidisciplinary; Materials Science ; Coatings & Films; Physics ; Applied; Physics ; Condensed Matter
收录类别	SCI
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95785]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Lei,YM,Yu,YH,Ren,CX,et al. Compositional and structural studies of DC magnetron sputtered SiC films on Si(111)[J]. THIN SOLID FILMS,2000,365(1):53-57.
APA	Lei,YM.,Yu,YH.,Ren,CX.,Zou,SC.,Chen,DH.,...&Wilson,IH.(2000).Compositional and structural studies of DC magnetron sputtered SiC films on Si(111).THIN SOLID FILMS,365(1),53-57.
MLA	Lei,YM,et al."Compositional and structural studies of DC magnetron sputtered SiC films on Si(111)".THIN SOLID FILMS 365.1(2000):53-57.