A novel silicon micromachined gyroscope with high Q at atmosphere

	A novel silicon micromachined gyroscope with high Q at atmosphere
	Xiong, B ; Wang, YL ; Che, LF ; Wang, WY
刊名	MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY AND DEVICES
	2001
卷号	4601 页码:38-42
关键词	MICROSTRUCTURES BEAM
ISSN号	0277-786X
通讯作者	Xiong, B, Chinese Acad Sci, Shanghai Inst Met, State Key Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China
学科主题	Optics
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95733]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Xiong, B,Wang, YL,Che, LF,et al. A novel silicon micromachined gyroscope with high Q at atmosphere[J]. MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY AND DEVICES,2001,4601:38-42.
APA	Xiong, B,Wang, YL,Che, LF,&Wang, WY.(2001).A novel silicon micromachined gyroscope with high Q at atmosphere.MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY AND DEVICES,4601,38-42.
MLA	Xiong, B,et al."A novel silicon micromachined gyroscope with high Q at atmosphere".MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY AND DEVICES 4601(2001):38-42.