Mechanical properties of titanium oxide film deposited on LTI-carbon by IBED

	Mechanical properties of titanium oxide film deposited on LTI-carbon by IBED
	Wang, XH ; Liu, XH ; Wang, X ; Li, CR ; Yu, LJ ; Zhang, F ; Zheng, ZH ; Yang, SQ
刊名	SURFACE & COATINGS TECHNOLOGY
	2002
卷号	158 页码:563-567
关键词	ADHESION STRENGTH IN-VIVO LAYER
ISSN号	0257-8972
通讯作者	Wang, XH, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai, Peoples R China
学科主题	Materials Science, Coatings & Films; Physics, Applied
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95645]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Wang, XH,Liu, XH,Wang, X,et al. Mechanical properties of titanium oxide film deposited on LTI-carbon by IBED[J]. SURFACE & COATINGS TECHNOLOGY,2002,158:563-567.
APA	Wang, XH.,Liu, XH.,Wang, X.,Li, CR.,Yu, LJ.,...&Yang, SQ.(2002).Mechanical properties of titanium oxide film deposited on LTI-carbon by IBED.SURFACE & COATINGS TECHNOLOGY,158,563-567.
MLA	Wang, XH,et al."Mechanical properties of titanium oxide film deposited on LTI-carbon by IBED".SURFACE & COATINGS TECHNOLOGY 158(2002):563-567.