Friction and wear properties in MEMS
Wang, WY ; Wang, YL ; Bao, HF ; Xiong, B ; Bao, MH
刊名SENSORS AND ACTUATORS A-PHYSICAL
2002
卷号Aug-97页码:486-491
关键词ATOMIC-FORCE MICROSCOPY SILICON SURFACE ADHESION COATINGS
ISSN号0924-4247
通讯作者Bao, MH, Fudan Univ, Dept Elect Engn, Shanghai 200433, Peoples R China
学科主题Engineering, Electrical & Electronic; Instruments & Instrumentation
收录类别SCI
语种英语
公开日期2012-03-24
内容类型期刊论文
源URL[http://ir.sim.ac.cn/handle/331004/95574]  
专题上海微系统与信息技术研究所_功能材料与器件_期刊论文
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GB/T 7714
Wang, WY,Wang, YL,Bao, HF,et al. Friction and wear properties in MEMS[J]. SENSORS AND ACTUATORS A-PHYSICAL,2002,Aug-97:486-491.
APA Wang, WY,Wang, YL,Bao, HF,Xiong, B,&Bao, MH.(2002).Friction and wear properties in MEMS.SENSORS AND ACTUATORS A-PHYSICAL,Aug-97,486-491.
MLA Wang, WY,et al."Friction and wear properties in MEMS".SENSORS AND ACTUATORS A-PHYSICAL Aug-97(2002):486-491.
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