Monolithic beam splitter in silicon-on-insulator

	Monolithic beam splitter in silicon-on-insulator
	Wang, YJ ; Cheng, XL ; Lin, ZL ; Gao, F ; Zhang, F
刊名	OPTICS EXPRESS
	2004
卷号	12 期号:21 页码:5154-5159
关键词	OPTICAL WAVE-GUIDES OPTOELECTRONIC DEVICES SIDEWALL ROUGHNESS MIRRORS FABRICATION DESIGN SI
ISSN号	1094-4087
通讯作者	Wang, YJ, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Ion Beam Lab, 865 Changning Rd, Shanghai 200050, Peoples R China
学科主题	Optics
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95453]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Wang, YJ,Cheng, XL,Lin, ZL,et al. Monolithic beam splitter in silicon-on-insulator[J]. OPTICS EXPRESS,2004,12(21):5154-5159.
APA	Wang, YJ,Cheng, XL,Lin, ZL,Gao, F,&Zhang, F.(2004).Monolithic beam splitter in silicon-on-insulator.OPTICS EXPRESS,12(21),5154-5159.
MLA	Wang, YJ,et al."Monolithic beam splitter in silicon-on-insulator".OPTICS EXPRESS 12.21(2004):5154-5159.