Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition

	Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition
	Yan, Z ; Song, ZT ; Liu, WL ; Wan, Q ; Zhang, FM ; Feng, SL
刊名	THIN SOLID FILMS
	2005
卷号	492 期号:1-2 页码:203-206
关键词	CHEMICAL-VAPOR-DEPOSITION ZNO FILMS TEMPERATURE
ISSN号	0040-6090
通讯作者	Yan, Z, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Res Ctr Funct Semicond Film Engn Technol, Shanghai 200050, Peoples R China
学科主题	Materials Science, Multidisciplinary; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95332]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Yan, Z,Song, ZT,Liu, WL,et al. Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition[J]. THIN SOLID FILMS,2005,492(1-2):203-206.
APA	Yan, Z,Song, ZT,Liu, WL,Wan, Q,Zhang, FM,&Feng, SL.(2005).Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition.THIN SOLID FILMS,492(1-2),203-206.
MLA	Yan, Z,et al."Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition".THIN SOLID FILMS 492.1-2(2005):203-206.