Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition | |
Yan, Z ; Song, ZT ; Liu, WL ; Wan, Q ; Zhang, FM ; Feng, SL | |
刊名 | THIN SOLID FILMS
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2005 | |
卷号 | 492期号:1-2页码:203-206 |
关键词 | CHEMICAL-VAPOR-DEPOSITION ZNO FILMS TEMPERATURE |
ISSN号 | 0040-6090 |
通讯作者 | Yan, Z, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Res Ctr Funct Semicond Film Engn Technol, Shanghai 200050, Peoples R China |
学科主题 | Materials Science, Multidisciplinary; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2012-03-24 |
内容类型 | 期刊论文 |
源URL | [http://ir.sim.ac.cn/handle/331004/95332] ![]() |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
推荐引用方式 GB/T 7714 | Yan, Z,Song, ZT,Liu, WL,et al. Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition[J]. THIN SOLID FILMS,2005,492(1-2):203-206. |
APA | Yan, Z,Song, ZT,Liu, WL,Wan, Q,Zhang, FM,&Feng, SL.(2005).Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition.THIN SOLID FILMS,492(1-2),203-206. |
MLA | Yan, Z,et al."Optical and electrical properties of p-type zinc oxide thin films synthesized by ion beam assisted deposition".THIN SOLID FILMS 492.1-2(2005):203-206. |
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