Damascene array structure of phase change memory fabricated with chemical mechanical polishing method | |
Liu, QB ; Song, ZT ; Zhang, KL ; Wang, LY ; Feng, SL ; Chen, BM | |
刊名 | CHINESE PHYSICS LETTERS
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2006 | |
卷号 | 23期号:8页码:2296-2298 |
关键词 | ION-BEAM METHOD CELL-ELEMENT |
ISSN号 | 0256-307X |
通讯作者 | Liu, QB, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Lab Nanotechnol, Shanghai 200050, Peoples R China |
学科主题 | Physics, Multidisciplinary |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2012-03-24 |
内容类型 | 期刊论文 |
源URL | [http://ir.sim.ac.cn/handle/331004/95180] ![]() |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
推荐引用方式 GB/T 7714 | Liu, QB,Song, ZT,Zhang, KL,et al. Damascene array structure of phase change memory fabricated with chemical mechanical polishing method[J]. CHINESE PHYSICS LETTERS,2006,23(8):2296-2298. |
APA | Liu, QB,Song, ZT,Zhang, KL,Wang, LY,Feng, SL,&Chen, BM.(2006).Damascene array structure of phase change memory fabricated with chemical mechanical polishing method.CHINESE PHYSICS LETTERS,23(8),2296-2298. |
MLA | Liu, QB,et al."Damascene array structure of phase change memory fabricated with chemical mechanical polishing method".CHINESE PHYSICS LETTERS 23.8(2006):2296-2298. |
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