Effect of chemicals on chemical mechanical polishing of glass substrates

	Effect of chemicals on chemical mechanical polishing of glass substrates
	Wang, LY ; Zhang, KL ; Song, ZT ; Feng, SL
刊名	CHINESE PHYSICS LETTERS
	2007
卷号	24 期号:1 页码:259-261
关键词	ABRASIVES SURFACE
ISSN号	0256-307X
通讯作者	Zhang, KL, Chinese Acad Sci, Lab Nanotechnol, Res Ctr Funct Semicond Film Engn & Technol, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China
学科主题	Physics, Multidisciplinary
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95084]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Wang, LY,Zhang, KL,Song, ZT,et al. Effect of chemicals on chemical mechanical polishing of glass substrates[J]. CHINESE PHYSICS LETTERS,2007,24(1):259-261.
APA	Wang, LY,Zhang, KL,Song, ZT,&Feng, SL.(2007).Effect of chemicals on chemical mechanical polishing of glass substrates.CHINESE PHYSICS LETTERS,24(1),259-261.
MLA	Wang, LY,et al."Effect of chemicals on chemical mechanical polishing of glass substrates".CHINESE PHYSICS LETTERS 24.1(2007):259-261.