Raman spectra of intrinsic and doped hydrogenated nanocrystalline silicon films

	Raman spectra of intrinsic and doped hydrogenated nanocrystalline silicon films
	Wei, WS ; Xu, GY ; Wang, JL ; Wang, TM
刊名	VACUUM
	2007
卷号	81 期号:5 页码:656-662
关键词	AMORPHOUS-SILICON STRUCTURAL ORDER SI SCATTERING TEMPERATURE MICROCRYSTALLINE
ISSN号	0042-207X
通讯作者	Wei, WS, Wenzhou Univ, Sch Phys & Elect Informat, Wenzhou 325027, Peoples R China
学科主题	Materials Science, Multidisciplinary; Physics, Applied
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95082]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Wei, WS,Xu, GY,Wang, JL,et al. Raman spectra of intrinsic and doped hydrogenated nanocrystalline silicon films[J]. VACUUM,2007,81(5):656-662.
APA	Wei, WS,Xu, GY,Wang, JL,&Wang, TM.(2007).Raman spectra of intrinsic and doped hydrogenated nanocrystalline silicon films.VACUUM,81(5),656-662.
MLA	Wei, WS,et al."Raman spectra of intrinsic and doped hydrogenated nanocrystalline silicon films".VACUUM 81.5(2007):656-662.