Squeeze film air damping in MEMS

	Squeeze film air damping in MEMS
	Bao, MH ; Yang, H
刊名	SENSORS AND ACTUATORS A-PHYSICAL
	2007
卷号	136 期号:1 页码:3-27
关键词	TORSION MIRROR VACUUM MODEL ACCELEROMETER POLYSILICON SIMULATION
ISSN号	0924-4247
通讯作者	Bao, MH, Fudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China
学科主题	Engineering, Electrical & Electronic; Instruments & Instrumentation
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95042]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Bao, MH,Yang, H. Squeeze film air damping in MEMS[J]. SENSORS AND ACTUATORS A-PHYSICAL,2007,136(1):3-27.
APA	Bao, MH,&Yang, H.(2007).Squeeze film air damping in MEMS.SENSORS AND ACTUATORS A-PHYSICAL,136(1),3-27.
MLA	Bao, MH,et al."Squeeze film air damping in MEMS".SENSORS AND ACTUATORS A-PHYSICAL 136.1(2007):3-27.