Fabrication of single-crystalline LiTaO3 film on silicon substrate using thin film transfer technology

	Fabrication of single-crystalline LiTaO3 film on silicon substrate using thin film transfer technology
	Liu, WL ; Zhan, D ; Ma, XB
刊名	JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
	2008
卷号	26 期号:1 页码:206-208
关键词	WAVE-GUIDES LINBO3
ISSN号	1071-1023
通讯作者	Liu, WL, Shanghai Inst Microsyst & Informat Technol, Nano Technol Lab, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China
学科主题	Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/94926]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Liu, WL,Zhan, D,Ma, XB. Fabrication of single-crystalline LiTaO3 film on silicon substrate using thin film transfer technology[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,2008,26(1):206-208.
APA	Liu, WL,Zhan, D,&Ma, XB.(2008).Fabrication of single-crystalline LiTaO3 film on silicon substrate using thin film transfer technology.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,26(1),206-208.
MLA	Liu, WL,et al."Fabrication of single-crystalline LiTaO3 film on silicon substrate using thin film transfer technology".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 26.1(2008):206-208.