Fabrication of single-crystalline LiTaO3 film on silicon substrate using thin film transfer technology | |
Liu, WL ; Zhan, D ; Ma, XB | |
刊名 | JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
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2008 | |
卷号 | 26期号:1页码:206-208 |
关键词 | WAVE-GUIDES LINBO3 |
ISSN号 | 1071-1023 |
通讯作者 | Liu, WL, Shanghai Inst Microsyst & Informat Technol, Nano Technol Lab, State Key Lab Funct Mat Informat, Shanghai 200050, Peoples R China |
学科主题 | Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Physics, Applied |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2012-03-24 |
内容类型 | 期刊论文 |
源URL | [http://ir.sim.ac.cn/handle/331004/94926] ![]() |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文 |
推荐引用方式 GB/T 7714 | Liu, WL,Zhan, D,Ma, XB. Fabrication of single-crystalline LiTaO3 film on silicon substrate using thin film transfer technology[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,2008,26(1):206-208. |
APA | Liu, WL,Zhan, D,&Ma, XB.(2008).Fabrication of single-crystalline LiTaO3 film on silicon substrate using thin film transfer technology.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,26(1),206-208. |
MLA | Liu, WL,et al."Fabrication of single-crystalline LiTaO3 film on silicon substrate using thin film transfer technology".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 26.1(2008):206-208. |
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