Fabrication of polycrystalline diamond film resonators

	Fabrication of polycrystalline diamond film resonators
	Wang, XD ; Yang, YR ; Xie, JF ; Wang, WY ; Ren, CX
刊名	MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY IV
	1998
卷号	3511 页码:169-173
ISSN号	0277-786X
通讯作者	Wang, XD, Chinese Acad Sci, Shanghai Inst Met, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
学科主题	Optics
收录类别	SCI
原文出处	http://apps.webofknowledge.com/full_record.do?product=UA&search_mode=GeneralSearch&qid=68&SID=U2Dd7d3LH2B7cJ1ihDC&page=1&doc=8
语种	英语
公开日期	2012-03-25
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/98956]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前)
推荐引用方式 GB/T 7714	Wang, XD,Yang, YR,Xie, JF,et al. Fabrication of polycrystalline diamond film resonators[J]. MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY IV,1998,3511:169-173.
APA	Wang, XD,Yang, YR,Xie, JF,Wang, WY,&Ren, CX.(1998).Fabrication of polycrystalline diamond film resonators.MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY IV,3511,169-173.
MLA	Wang, XD,et al."Fabrication of polycrystalline diamond film resonators".MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY IV 3511(1998):169-173.