Balance-approach for mechanical properties test of micro fabricated structure

	Balance-approach for mechanical properties test of micro fabricated structure
	Xiong, XG ; Zou, Q ; Lu, DR ; Wang, WY
刊名	MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY III
	1997
卷号	3223 页码:294-302
通讯作者	Xiong, XG, CHINESE ACAD SCI,SHANGHAI INST MET,STATE KEY LAB TRANSDUCER TECHNOL,865 CHANGNING RD,SHANGHAI 200050,PEOPLES R CHINA
学科主题	Optics
收录类别	SCI
原文出处	http://apps.webofknowledge.com/full_record.do?product=UA&search_mode=GeneralSearch&qid=149&SID=Y1p6iIKgd@dencla9el&page=1&doc=1
语种	英语
公开日期	2012-03-25
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/98883]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前)
推荐引用方式 GB/T 7714	Xiong, XG,Zou, Q,Lu, DR,et al. Balance-approach for mechanical properties test of micro fabricated structure[J]. MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY III,1997,3223:294-302.
APA	Xiong, XG,Zou, Q,Lu, DR,&Wang, WY.(1997).Balance-approach for mechanical properties test of micro fabricated structure.MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY III,3223,294-302.
MLA	Xiong, XG,et al."Balance-approach for mechanical properties test of micro fabricated structure".MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY III 3223(1997):294-302.