Structure design and fabrication of symmetric force-balance micromachining capacitive accelerometer | |
Zou, Q ; Lu, DR ; Li, BQ ; Xiong, XG ; Xiong, B ; Wang, WY | |
刊名 | MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY III
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1997 | |
卷号 | 3223页码:284-293 |
通讯作者 | Zou, Q, CHINESE ACAD SCI,SHANGHAI INST MET,STATE KEY LAB TRANSDUCER TECHNOL,865 CHANGNING RD,SHANGHAI 200050,PEOPLES R CHINA |
学科主题 | Optics |
收录类别 | SCI |
原文出处 | http://apps.webofknowledge.com/full_record.do?product=UA&search_mode=GeneralSearch&qid=147&SID=Y1p6iIKgd@dencla9el&page=1&doc=1 |
语种 | 英语 |
公开日期 | 2012-03-25 |
内容类型 | 期刊论文 |
源URL | [http://ir.sim.ac.cn/handle/331004/98882] ![]() |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文(1999年以前) |
推荐引用方式 GB/T 7714 | Zou, Q,Lu, DR,Li, BQ,et al. Structure design and fabrication of symmetric force-balance micromachining capacitive accelerometer[J]. MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY III,1997,3223:284-293. |
APA | Zou, Q,Lu, DR,Li, BQ,Xiong, XG,Xiong, B,&Wang, WY.(1997).Structure design and fabrication of symmetric force-balance micromachining capacitive accelerometer.MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY III,3223,284-293. |
MLA | Zou, Q,et al."Structure design and fabrication of symmetric force-balance micromachining capacitive accelerometer".MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY III 3223(1997):284-293. |
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