Structure design and fabrication of symmetric force-balance micromachining capacitive accelerometer
Zou, Q ; Lu, DR ; Li, BQ ; Xiong, XG ; Xiong, B ; Wang, WY
刊名MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY III
1997
卷号3223页码:284-293
通讯作者Zou, Q, CHINESE ACAD SCI,SHANGHAI INST MET,STATE KEY LAB TRANSDUCER TECHNOL,865 CHANGNING RD,SHANGHAI 200050,PEOPLES R CHINA
学科主题Optics
收录类别SCI
原文出处http://apps.webofknowledge.com/full_record.do?product=UA&search_mode=GeneralSearch&qid=147&SID=Y1p6iIKgd@dencla9el&page=1&doc=1
语种英语
公开日期2012-03-25
内容类型期刊论文
源URL[http://ir.sim.ac.cn/handle/331004/98882]  
专题上海微系统与信息技术研究所_功能材料与器件_期刊论文(1999年以前)
推荐引用方式
GB/T 7714
Zou, Q,Lu, DR,Li, BQ,et al. Structure design and fabrication of symmetric force-balance micromachining capacitive accelerometer[J]. MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY III,1997,3223:284-293.
APA Zou, Q,Lu, DR,Li, BQ,Xiong, XG,Xiong, B,&Wang, WY.(1997).Structure design and fabrication of symmetric force-balance micromachining capacitive accelerometer.MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY III,3223,284-293.
MLA Zou, Q,et al."Structure design and fabrication of symmetric force-balance micromachining capacitive accelerometer".MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY III 3223(1997):284-293.
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