GRAZING-ANGLE RBS AND CHANNELING ANALYSIS OF BF2+ IMPLANTATION DAMAGE IN SILICON

	GRAZING-ANGLE RBS AND CHANNELING ANALYSIS OF BF2+ IMPLANTATION DAMAGE IN SILICON
	LIN, CL ; ZHOU, ZY ; HEMMENT, PLF ; LI, XQ ; YANG, GQ ; ZHU, WH ; Zou, SC(邹世昌）
刊名	PHYSICA STATUS SOLIDI A-APPLIED RESEARCH
	1994
卷号	142 期号:2 页码:365-370
ISSN号	0031-8965
通讯作者	LIN, CL, CHINESE ACAD SCI,SHANGHAI INST MET,STATE KEY LAB FUNCT MAT INFORMAT,SHANGHAI 200050,PEOPLES R CHINA
学科主题	Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter
收录类别	SCI
原文出处	http://onlinelibrary.wiley.com/doi/10.1002/pssa.2211420209/abstract
语种	英语
公开日期	2012-03-25
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/98547]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前)
推荐引用方式 GB/T 7714	LIN, CL,ZHOU, ZY,HEMMENT, PLF,et al. GRAZING-ANGLE RBS AND CHANNELING ANALYSIS OF BF2+ IMPLANTATION DAMAGE IN SILICON[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH,1994,142(2):365-370.
APA	LIN, CL.,ZHOU, ZY.,HEMMENT, PLF.,LI, XQ.,YANG, GQ.,...&Zou, SC.(1994).GRAZING-ANGLE RBS AND CHANNELING ANALYSIS OF BF2+ IMPLANTATION DAMAGE IN SILICON.PHYSICA STATUS SOLIDI A-APPLIED RESEARCH,142(2),365-370.
MLA	LIN, CL,et al."GRAZING-ANGLE RBS AND CHANNELING ANALYSIS OF BF2+ IMPLANTATION DAMAGE IN SILICON".PHYSICA STATUS SOLIDI A-APPLIED RESEARCH 142.2(1994):365-370.