GRAZING-ANGLE RBS AND CHANNELING ANALYSIS OF BF2+ IMPLANTATION DAMAGE IN SILICON | |
LIN, CL ; ZHOU, ZY ; HEMMENT, PLF ; LI, XQ ; YANG, GQ ; ZHU, WH ; Zou, SC(邹世昌) | |
刊名 | PHYSICA STATUS SOLIDI A-APPLIED RESEARCH
![]() |
1994 | |
卷号 | 142期号:2页码:365-370 |
ISSN号 | 0031-8965 |
通讯作者 | LIN, CL, CHINESE ACAD SCI,SHANGHAI INST MET,STATE KEY LAB FUNCT MAT INFORMAT,SHANGHAI 200050,PEOPLES R CHINA |
学科主题 | Materials Science, Multidisciplinary; Physics, Applied; Physics, Condensed Matter |
收录类别 | SCI |
原文出处 | http://onlinelibrary.wiley.com/doi/10.1002/pssa.2211420209/abstract |
语种 | 英语 |
公开日期 | 2012-03-25 |
内容类型 | 期刊论文 |
源URL | [http://ir.sim.ac.cn/handle/331004/98547] ![]() |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文(1999年以前) |
推荐引用方式 GB/T 7714 | LIN, CL,ZHOU, ZY,HEMMENT, PLF,et al. GRAZING-ANGLE RBS AND CHANNELING ANALYSIS OF BF2+ IMPLANTATION DAMAGE IN SILICON[J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH,1994,142(2):365-370. |
APA | LIN, CL.,ZHOU, ZY.,HEMMENT, PLF.,LI, XQ.,YANG, GQ.,...&Zou, SC.(1994).GRAZING-ANGLE RBS AND CHANNELING ANALYSIS OF BF2+ IMPLANTATION DAMAGE IN SILICON.PHYSICA STATUS SOLIDI A-APPLIED RESEARCH,142(2),365-370. |
MLA | LIN, CL,et al."GRAZING-ANGLE RBS AND CHANNELING ANALYSIS OF BF2+ IMPLANTATION DAMAGE IN SILICON".PHYSICA STATUS SOLIDI A-APPLIED RESEARCH 142.2(1994):365-370. |
个性服务 |
查看访问统计 |
相关权益政策 |
暂无数据 |
收藏/分享 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论