ELECTRICAL CHARACTERIZATION OF THIN-FILM SIMOX STRUCTURES

CORC > 上海微系统与信息技术研究所 > 功能材料与器件 > 期刊论文（1999年以前)

	ELECTRICAL CHARACTERIZATION OF THIN-FILM SIMOX STRUCTURES
	ZHU, WH ; LIN, CL ; SHI, ZY ; Zou, SC(邹世昌） ; HEMMENT, PLF ; NEJIM, A
刊名	NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
	1993
卷号	74 期号:1-2 页码:218-221
关键词	SILICON LAYERS
ISSN号	0168-583X
通讯作者	ZHU, WH, CHINESE ACAD SCI,SHANGHAI INST MET,ION BEAM LAB,SHANGHAI 200050,PEOPLES R CHINA
学科主题	Instruments & Instrumentation; Nuclear Science & Technology; Physics, Atomic, Molecular & Chemical; Physics, Nuclear
收录类别	SCI
原文出处	http://www.sciencedirect.com/science/article/pii/0168583X93950479
语种	英语
公开日期	2012-03-25
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/98485]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文（1999年以前)
推荐引用方式 GB/T 7714	ZHU, WH,LIN, CL,SHI, ZY,et al. ELECTRICAL CHARACTERIZATION OF THIN-FILM SIMOX STRUCTURES[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1993,74(1-2):218-221.
APA	ZHU, WH,LIN, CL,SHI, ZY,Zou, SC,HEMMENT, PLF,&NEJIM, A.(1993).ELECTRICAL CHARACTERIZATION OF THIN-FILM SIMOX STRUCTURES.NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,74(1-2),218-221.
MLA	ZHU, WH,et al."ELECTRICAL CHARACTERIZATION OF THIN-FILM SIMOX STRUCTURES".NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS 74.1-2(1993):218-221.