INFRARED-ABSORPTION AND REFLECTION SPECTROSCOPIC STUDIES OF SOI STRUCTURES FORMED BY OXYGEN OR NITROGEN IMPLANTATION | |
YU, YH ; FANG, Z ; LIN, C ; Zou, SC(邹世昌) ; HEMMENT, PLF | |
刊名 | MATERIALS LETTERS
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1989 | |
卷号 | 8期号:3-4页码:95-100 |
ISSN号 | 0167-577X |
通讯作者 | YU, YH, ACAD SINICA,SHANGHAI INST MET,ION BEAM LAB,865 CHANG NING RD,SHANGHAI 200050,PEOPLES R CHINA |
学科主题 | Materials Science, Multidisciplinary; Physics, Applied |
收录类别 | SCI |
原文出处 | http://www.sciencedirect.com/science/article/pii/0167577X89901353 |
语种 | 英语 |
公开日期 | 2012-03-25 |
内容类型 | 期刊论文 |
源URL | [http://ir.sim.ac.cn/handle/331004/98179] ![]() |
专题 | 上海微系统与信息技术研究所_功能材料与器件_期刊论文(1999年以前) |
推荐引用方式 GB/T 7714 | YU, YH,FANG, Z,LIN, C,et al. INFRARED-ABSORPTION AND REFLECTION SPECTROSCOPIC STUDIES OF SOI STRUCTURES FORMED BY OXYGEN OR NITROGEN IMPLANTATION[J]. MATERIALS LETTERS,1989,8(3-4):95-100. |
APA | YU, YH,FANG, Z,LIN, C,Zou, SC,&HEMMENT, PLF.(1989).INFRARED-ABSORPTION AND REFLECTION SPECTROSCOPIC STUDIES OF SOI STRUCTURES FORMED BY OXYGEN OR NITROGEN IMPLANTATION.MATERIALS LETTERS,8(3-4),95-100. |
MLA | YU, YH,et al."INFRARED-ABSORPTION AND REFLECTION SPECTROSCOPIC STUDIES OF SOI STRUCTURES FORMED BY OXYGEN OR NITROGEN IMPLANTATION".MATERIALS LETTERS 8.3-4(1989):95-100. |
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