INFRARED-ABSORPTION AND REFLECTION SPECTROSCOPIC STUDIES OF SOI STRUCTURES FORMED BY OXYGEN OR NITROGEN IMPLANTATION
YU, YH ; FANG, Z ; LIN, C ; Zou, SC(邹世昌) ; HEMMENT, PLF
刊名MATERIALS LETTERS
1989
卷号8期号:3-4页码:95-100
ISSN号0167-577X
通讯作者YU, YH, ACAD SINICA,SHANGHAI INST MET,ION BEAM LAB,865 CHANG NING RD,SHANGHAI 200050,PEOPLES R CHINA
学科主题Materials Science, Multidisciplinary; Physics, Applied
收录类别SCI
原文出处http://www.sciencedirect.com/science/article/pii/0167577X89901353
语种英语
公开日期2012-03-25
内容类型期刊论文
源URL[http://ir.sim.ac.cn/handle/331004/98179]  
专题上海微系统与信息技术研究所_功能材料与器件_期刊论文(1999年以前)
推荐引用方式
GB/T 7714
YU, YH,FANG, Z,LIN, C,et al. INFRARED-ABSORPTION AND REFLECTION SPECTROSCOPIC STUDIES OF SOI STRUCTURES FORMED BY OXYGEN OR NITROGEN IMPLANTATION[J]. MATERIALS LETTERS,1989,8(3-4):95-100.
APA YU, YH,FANG, Z,LIN, C,Zou, SC,&HEMMENT, PLF.(1989).INFRARED-ABSORPTION AND REFLECTION SPECTROSCOPIC STUDIES OF SOI STRUCTURES FORMED BY OXYGEN OR NITROGEN IMPLANTATION.MATERIALS LETTERS,8(3-4),95-100.
MLA YU, YH,et al."INFRARED-ABSORPTION AND REFLECTION SPECTROSCOPIC STUDIES OF SOI STRUCTURES FORMED BY OXYGEN OR NITROGEN IMPLANTATION".MATERIALS LETTERS 8.3-4(1989):95-100.
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