A cost-effective flexible MEMS technique for temperature sensing

	A cost-effective flexible MEMS technique for temperature sensing
	Xiao, SY ; Che, LF ; Li, XX ; Wang, YL
刊名	MICROELECTRONICS JOURNAL
	2007
卷号	38 期号:3 页码:360-364
关键词	SHEAR-STRESS SENSOR FILMS
ISSN号	0026-2692
通讯作者	Che, LF, Chinese Acad Sci, State Key Lab Transducer Technol, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China
学科主题	Engineering, Electrical & Electronic; Nanoscience & Nanotechnology
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38650]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Xiao, SY,Che, LF,Li, XX,et al. A cost-effective flexible MEMS technique for temperature sensing[J]. MICROELECTRONICS JOURNAL,2007,38(3):360-364.
APA	Xiao, SY,Che, LF,Li, XX,&Wang, YL.(2007).A cost-effective flexible MEMS technique for temperature sensing.MICROELECTRONICS JOURNAL,38(3),360-364.
MLA	Xiao, SY,et al."A cost-effective flexible MEMS technique for temperature sensing".MICROELECTRONICS JOURNAL 38.3(2007):360-364.