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	Accurately following measuring technique for warpage of substrate glass
	Shao, Wei; Guo, Jun-Jie; Chang, Ting; Liu, Chong
刊名	Jiliang Xuebao/Acta Metrologica Sinica
	2013
卷号	34期号:[db:dc_citation_issue]页码:221-225
关键词	Following scanning Metrology RAPW_GMV control Real-time adjusting Warpage
ISSN号	1000-1158
DOI	[db:dc_identifier_doi]
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3310629
专题	西安交通大学
推荐引用方式 GB/T 7714	Shao, Wei,Guo, Jun-Jie,Chang, Ting,et al. Accurately following measuring technique for warpage of substrate glass[J]. Jiliang Xuebao/Acta Metrologica Sinica,2013,34([db:dc_citation_issue]):221-225.
APA	Shao, Wei,Guo, Jun-Jie,Chang, Ting,&Liu, Chong.(2013).Accurately following measuring technique for warpage of substrate glass.Jiliang Xuebao/Acta Metrologica Sinica,34([db:dc_citation_issue]),221-225.
MLA	Shao, Wei,et al."Accurately following measuring technique for warpage of substrate glass".Jiliang Xuebao/Acta Metrologica Sinica 34.[db:dc_citation_issue](2013):221-225.

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