| Mask Chemical Micromachining of Cylindrical Array Structures on Copper Substrates | |
| Gao, Mingqian; Song, Jinlong; Cui, Yao; Zhao, Changlin | |
| 2017 | |
| 会议名称 | 5th International Conference on Frontiers of Manufacturing Science and Measuring Technology (FMSMT) |
| 会议日期 | 2017-01-01 |
| 会议地点 | Taiyuan, PEOPLES R CHINA |
| 关键词 | Microarray Photoresist Chemical etching Micro-machining |
| 页码 | 1158-1161 |
| 会议录 | 5th International Conference on Frontiers of Manufacturing Science and Measuring Technology (FMSMT)
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| URL标识 | 查看原文 |
| WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/3309441 |
| 专题 | 大连理工大学 |
| 作者单位 | 1.Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Peoples R China. 2.Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Peoples R China. 3.Dalian Univ Technol, Collaborat Innovat Ctr Major Machine Mfg Liaoning, Dalian 116024, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Gao, Mingqian,Song, Jinlong,Cui, Yao,et al. Mask Chemical Micromachining of Cylindrical Array Structures on Copper Substrates[C]. 见:5th International Conference on Frontiers of Manufacturing Science and Measuring Technology (FMSMT). Taiyuan, PEOPLES R CHINA. 2017-01-01. |
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