Mask Chemical Micromachining of Cylindrical Array Structures on Copper Substrates | |
Gao, Mingqian; Song, Jinlong; Cui, Yao; Zhao, Changlin | |
2017 | |
会议名称 | 5th International Conference on Frontiers of Manufacturing Science and Measuring Technology (FMSMT) |
会议日期 | 2017-01-01 |
会议地点 | Taiyuan, PEOPLES R CHINA |
关键词 | Microarray Photoresist Chemical etching Micro-machining |
页码 | 1158-1161 |
会议录 | 5th International Conference on Frontiers of Manufacturing Science and Measuring Technology (FMSMT)
![]() |
URL标识 | 查看原文 |
WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
内容类型 | 会议论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/3309441 |
专题 | 大连理工大学 |
作者单位 | 1.Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Peoples R China. 2.Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Peoples R China. 3.Dalian Univ Technol, Collaborat Innovat Ctr Major Machine Mfg Liaoning, Dalian 116024, Peoples R China. |
推荐引用方式 GB/T 7714 | Gao, Mingqian,Song, Jinlong,Cui, Yao,et al. Mask Chemical Micromachining of Cylindrical Array Structures on Copper Substrates[C]. 见:5th International Conference on Frontiers of Manufacturing Science and Measuring Technology (FMSMT). Taiyuan, PEOPLES R CHINA. 2017-01-01. |
个性服务 |
查看访问统计 |
相关权益政策 |
暂无数据 |
收藏/分享 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论