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Effect of sputtering parameters on photoluminescence properties of Al doped ZnO films deposited on Si substrates
Chen, Haixia; Ding, Jijun; Guo, Wenge
刊名CERAMICS INTERNATIONAL
2014
卷号40期号:[db:dc_citation_issue]页码:4847-4851
关键词Magnetron sputtering Optical properties ZnO:Al thin films
ISSN号0272-8842
DOI[db:dc_identifier_doi]
URL标识查看原文
WOS记录号[DB:DC_IDENTIFIER_WOSID]
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/3295498
专题西安交通大学
推荐引用方式
GB/T 7714
Chen, Haixia,Ding, Jijun,Guo, Wenge. Effect of sputtering parameters on photoluminescence properties of Al doped ZnO films deposited on Si substrates[J]. CERAMICS INTERNATIONAL,2014,40([db:dc_citation_issue]):4847-4851.
APA Chen, Haixia,Ding, Jijun,&Guo, Wenge.(2014).Effect of sputtering parameters on photoluminescence properties of Al doped ZnO films deposited on Si substrates.CERAMICS INTERNATIONAL,40([db:dc_citation_issue]),4847-4851.
MLA Chen, Haixia,et al."Effect of sputtering parameters on photoluminescence properties of Al doped ZnO films deposited on Si substrates".CERAMICS INTERNATIONAL 40.[db:dc_citation_issue](2014):4847-4851.
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