High-performance monolithic triaxial piezoresistive shock accelerometers

	High-performance monolithic triaxial piezoresistive shock accelerometers
	Dong, PT ; Li, XX ; Yang, H ; Bao, HF ; Zhou, W ; Li, SY ; Feng, SL
刊名	SENSORS AND ACTUATORS A-PHYSICAL
	2008
卷号	141 期号:2 页码:339-346
关键词	MEMS SENSORS
ISSN号	0924-4247
通讯作者	Li, XX, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China
学科主题	Engineering, Electrical & Electronic; Instruments & Instrumentation
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38586]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Dong, PT,Li, XX,Yang, H,et al. High-performance monolithic triaxial piezoresistive shock accelerometers[J]. SENSORS AND ACTUATORS A-PHYSICAL,2008,141(2):339-346.
APA	Dong, PT.,Li, XX.,Yang, H.,Bao, HF.,Zhou, W.,...&Feng, SL.(2008).High-performance monolithic triaxial piezoresistive shock accelerometers.SENSORS AND ACTUATORS A-PHYSICAL,141(2),339-346.
MLA	Dong, PT,et al."High-performance monolithic triaxial piezoresistive shock accelerometers".SENSORS AND ACTUATORS A-PHYSICAL 141.2(2008):339-346.