A MEMS probe card with 2D dense-arrayed 'hoe'-shaped metal tips

	A MEMS probe card with 2D dense-arrayed 'hoe'-shaped metal tips
	Wang, F ; Li, XX ; Feng, SL
刊名	JOURNAL OF MICROMECHANICS AND MICROENGINEERING
	2008
卷号	18 期号:5 页码:55008-55008
ISSN号	0960-1317
通讯作者	Li, XX, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai 200050, Peoples R China
学科主题	Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; Instruments & Instrumentation; Materials Science, Multidisciplinary; Mechanics
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38557]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Wang, F,Li, XX,Feng, SL. A MEMS probe card with 2D dense-arrayed 'hoe'-shaped metal tips[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2008,18(5):55008-55008.
APA	Wang, F,Li, XX,&Feng, SL.(2008).A MEMS probe card with 2D dense-arrayed 'hoe'-shaped metal tips.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,18(5),55008-55008.
MLA	Wang, F,et al."A MEMS probe card with 2D dense-arrayed 'hoe'-shaped metal tips".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 18.5(2008):55008-55008.