A MEMS device for in-situ TEM test of SCS nanobeam | |
Jin,QH ; Wang,YL ; Li,T ; Li,XX ; Xu,FF | |
刊名 | SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES
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2008 | |
卷号 | 51期号:9页码:1491-1496 |
关键词 | MECHANICAL-PROPERTIES NANOSCALE STRUCTURES SILICON NANOWIRES FABRICATION SYSTEM AFM SEM |
ISSN号 | 1006-9321 |
通讯作者 | Wang, YL, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China |
学科主题 | Engineering, Multidisciplinary; Materials Science, Multidisciplinary |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2011-12-17 |
内容类型 | 期刊论文 |
源URL | [http://ir.sim.ac.cn/handle/331004/38526] ![]() |
专题 | 上海微系统与信息技术研究所_微系统技术_期刊论文 |
推荐引用方式 GB/T 7714 | Jin,QH,Wang,YL,Li,T,et al. A MEMS device for in-situ TEM test of SCS nanobeam[J]. SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES,2008,51(9):1491-1496. |
APA | Jin,QH,Wang,YL,Li,T,Li,XX,&Xu,FF.(2008).A MEMS device for in-situ TEM test of SCS nanobeam.SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES,51(9),1491-1496. |
MLA | Jin,QH,et al."A MEMS device for in-situ TEM test of SCS nanobeam".SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES 51.9(2008):1491-1496. |
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