A MEMS device for in-situ TEM test of SCS nanobeam

	A MEMS device for in-situ TEM test of SCS nanobeam
	Jin,QH ; Wang,YL ; Li,T ; Li,XX ; Xu,FF
刊名	SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES
	2008
卷号	51 期号:9 页码:1491-1496
关键词	MECHANICAL-PROPERTIES NANOSCALE STRUCTURES SILICON NANOWIRES FABRICATION SYSTEM AFM SEM
ISSN号	1006-9321
通讯作者	Wang, YL, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China
学科主题	Engineering, Multidisciplinary; Materials Science, Multidisciplinary
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38526]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Jin,QH,Wang,YL,Li,T,et al. A MEMS device for in-situ TEM test of SCS nanobeam[J]. SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES,2008,51(9):1491-1496.
APA	Jin,QH,Wang,YL,Li,T,Li,XX,&Xu,FF.(2008).A MEMS device for in-situ TEM test of SCS nanobeam.SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES,51(9),1491-1496.
MLA	Jin,QH,et al."A MEMS device for in-situ TEM test of SCS nanobeam".SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES 51.9(2008):1491-1496.