A non-isothermal model for squeeze film damping of rarefied gas

	A non-isothermal model for squeeze film damping of rarefied gas
	Yang, H ; Cheng, HT ; Dai, B ; Li, XX ; Wang, YL
刊名	2009 IEEE SENSORS, VOLS 1-3
	2009
页码	213-216
关键词	POLYSILICON REGIME MEMS
通讯作者	Yang, H, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, Shanghai, Peoples R China
学科主题	Engineering, Electrical & Electronic
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38402]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Yang, H,Cheng, HT,Dai, B,et al. A non-isothermal model for squeeze film damping of rarefied gas[J]. 2009 IEEE SENSORS, VOLS 1-3,2009:213-216.
APA	Yang, H,Cheng, HT,Dai, B,Li, XX,&Wang, YL.(2009).A non-isothermal model for squeeze film damping of rarefied gas.2009 IEEE SENSORS, VOLS 1-3,213-216.
MLA	Yang, H,et al."A non-isothermal model for squeeze film damping of rarefied gas".2009 IEEE SENSORS, VOLS 1-3 (2009):213-216.