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	Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas
	Xue, Chan; Gao, Fei; Liu, Yong-Xin; Liu, Jia; Wang, You-Nian
刊名	CHINESE PHYSICS B
	2018
卷号	27
关键词	ion energy distribution phase shift synchronous pulse modulated inductively coupled plasmas
ISSN号	1674-1056
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3263876
专题	大连理工大学
作者单位	1.Dalian Univ Technol, Sch Phys, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China. 2.Shanghai Inst Space Prop, Shanghai 201112, Peoples R China.
推荐引用方式 GB/T 7714	Xue, Chan,Gao, Fei,Liu, Yong-Xin,et al. Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas[J]. CHINESE PHYSICS B,2018,27.
APA	Xue, Chan,Gao, Fei,Liu, Yong-Xin,Liu, Jia,&Wang, You-Nian.(2018).Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas.CHINESE PHYSICS B,27.
MLA	Xue, Chan,et al."Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas".CHINESE PHYSICS B 27(2018).

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