| Influence of oxygen flow-rate on properties of magnetron-sputtered InGaZnO coatings | |
| Jiang, Kai; Li, Yuanjie; Mao, Yuzheng | |
| 刊名 | Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
 |
| 2015 | |
| 卷号 | 35期号:[db:dc_citation_issue]页码:1180-1184 |
| 关键词 | Amorphous InGaZnO Fabrication of thin films Hall effect measurement Microstructures and properties Optical absorption properties Reduction of oxygen rf-Magnetron sputtering Semi-conducting coatings |
| ISSN号 | 1672-7126 |
| DOI | [db:dc_identifier_doi] |
| URL标识 | 查看原文 |
| WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/3235200 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | Jiang, Kai,Li, Yuanjie,Mao, Yuzheng. Influence of oxygen flow-rate on properties of magnetron-sputtered InGaZnO coatings[J]. Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,2015,35([db:dc_citation_issue]):1180-1184. |
| APA | Jiang, Kai,Li, Yuanjie,&Mao, Yuzheng.(2015).Influence of oxygen flow-rate on properties of magnetron-sputtered InGaZnO coatings.Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,35([db:dc_citation_issue]),1180-1184. |
| MLA | Jiang, Kai,et al."Influence of oxygen flow-rate on properties of magnetron-sputtered InGaZnO coatings".Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology 35.[db:dc_citation_issue](2015):1180-1184. |
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