SIS Mixer Fabrication for ALMA Band10

CORC > 紫金山天文台 > 中国科学院紫金山天文台 > 毫米波和亚毫米波技术实验室

	SIS Mixer Fabrication for ALMA Band10
	Kroug, Matthias 1; Endo, A.1; Tamura, T.1; Noguchi, T.1; Kojima, T.1; Uzawa, Y.1; Takeda, M.2; Wang, Z.2 ; Shan, W.3
刊名	IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
	2009-06-01
卷号	19 期号:3 页码:171-173
关键词	ICP etching SIS mixer submillimeter wave receiver
ISSN号	1051-8223
英文摘要	Band10 of the Atacama Large Millimeter Array (ALMA) is a planned heterodyne receiver covering the frequency range 790 GHz-950 GHz. The waveguide mixers are superconductor insulator superconductor (SIS) Nb/Al - AlO(x)/Nb junctions integrated with NbTiN/SiO(2)/Al tuning circuits. Our junction definition process has been greatly simplified by introducing an inductively-coupled-plasma (ICP) etcher to the fabrication. The etching process, which employs a low-pressure CF(4)/O(2) plasma, allows to remove the entire Nb/Al - AlO(x)/Nb tri-layer in a single step. SIS mixers with current densities up to 10 kA/cm(2) and quality factor above 15 have been fabricated with good reproducibility. Minimum receiver noise temperature, corrected for optical losses, is 210 K at 860 GHz. With the goal to further improve the performance, optimization of circuit design and fabrication technology are discussed.
学科主题	Engineering; Physics
WOS标题词	Science & Technology ; Technology ; Physical Sciences
类目[WOS]	Engineering, Electrical & Electronic ; Physics, Applied
研究领域[WOS]	Engineering ; Physics
关键词[WOS]	JUNCTIONS
收录类别	SCI ; ISTP
语种	英语
WOS记录号	WOS:000268282000011
公开日期	2011-12-08
内容类型	期刊论文
源URL	[http://159.226.72.40/handle/332002/1691]
专题	紫金山天文台_毫米波和亚毫米波技术实验室
作者单位	1.Natl Inst Nat Sci, Natl Astron Observ Japan, Mitaka, Tokyo 1818588, Japan 2.Natl Inst Informat & Commun Technol, Kobe, Hyogo, Japan 3.Acad Sinica, Purple Mt Observ, Nanjing 210008, Peoples R China
推荐引用方式 GB/T 7714	Kroug, Matthias,Endo, A.,Tamura, T.,et al. SIS Mixer Fabrication for ALMA Band10[J]. IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,2009,19(3):171-173.
APA	Kroug, Matthias.,Endo, A..,Tamura, T..,Noguchi, T..,Kojima, T..,...&Shan, W..(2009).SIS Mixer Fabrication for ALMA Band10.IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY,19(3),171-173.
MLA	Kroug, Matthias,et al."SIS Mixer Fabrication for ALMA Band10".IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY 19.3(2009):171-173.