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	Synthesis and properties of amorphous indium-gallium-zinc-oxides thin films by DC reactive magnetron sputtering
	Li, Ling; Xue, Tao; Song, Zhongxiao; Zhang, Xiaoning; Liu, Chunliang
刊名	Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology
	2015
卷号	35期号:[db:dc_citation_issue]页码:1254-1258
关键词	Amorphous indium gallium zinc oxides (a igzo) Amorphous-indium gallium zinc oxides DC reactive magnetron sputtering Glass substrates Growth conditions Microstructures and properties Oxygen partial pressure Properties
ISSN号	1672-7126
DOI	[db:dc_identifier_doi]
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3234894
专题	西安交通大学
推荐引用方式 GB/T 7714	Li, Ling,Xue, Tao,Song, Zhongxiao,et al. Synthesis and properties of amorphous indium-gallium-zinc-oxides thin films by DC reactive magnetron sputtering[J]. Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,2015,35([db:dc_citation_issue]):1254-1258.
APA	Li, Ling,Xue, Tao,Song, Zhongxiao,Zhang, Xiaoning,&Liu, Chunliang.(2015).Synthesis and properties of amorphous indium-gallium-zinc-oxides thin films by DC reactive magnetron sputtering.Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology,35([db:dc_citation_issue]),1254-1258.
MLA	Li, Ling,et al."Synthesis and properties of amorphous indium-gallium-zinc-oxides thin films by DC reactive magnetron sputtering".Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology 35.[db:dc_citation_issue](2015):1254-1258.

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