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	Error Analysis and Compensation of a Laser Measurement System for Simultaneously Measuring Five-Degree-of-Freedom Error Motions of Linear Stages
	Cai, Yindi; Sang, Qi; Lou, Zhi-Feng; Fan, Kuang-Chao
刊名	SENSORS
	2019
卷号	19
关键词	laser diode multi-degree-of-freedom measurement error motions linear stage
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3227800
专题	大连理工大学
作者单位	Dalian Univ Technol, Key Lab Micro Nano Technol & Syst Liaoning Prov, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Cai, Yindi,Sang, Qi,Lou, Zhi-Feng,et al. Error Analysis and Compensation of a Laser Measurement System for Simultaneously Measuring Five-Degree-of-Freedom Error Motions of Linear Stages[J]. SENSORS,2019,19.
APA	Cai, Yindi,Sang, Qi,Lou, Zhi-Feng,&Fan, Kuang-Chao.(2019).Error Analysis and Compensation of a Laser Measurement System for Simultaneously Measuring Five-Degree-of-Freedom Error Motions of Linear Stages.SENSORS,19.
MLA	Cai, Yindi,et al."Error Analysis and Compensation of a Laser Measurement System for Simultaneously Measuring Five-Degree-of-Freedom Error Motions of Linear Stages".SENSORS 19(2019).

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