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	A New Capacitive Displacement Sensor With Nanometer Accuracy and Long Range
	Liu, Xiaokang; Peng, Kai; Chen, Ziran; Pu, Hongji; Yu, Zhicheng
刊名	IEEE SENSORS JOURNAL
	2016
卷号	16期号:[db:dc_citation_issue]页码:2306-2316
关键词	capacitive sensing time grating Displacement nanometrology long range
ISSN号	1530-437X
DOI	[db:dc_identifier_doi]
URL标识	查看原文
WOS记录号	[DB:DC_IDENTIFIER_WOSID]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/3220478
专题	西安交通大学
推荐引用方式 GB/T 7714	Liu, Xiaokang,Peng, Kai,Chen, Ziran,et al. A New Capacitive Displacement Sensor With Nanometer Accuracy and Long Range[J]. IEEE SENSORS JOURNAL,2016,16([db:dc_citation_issue]):2306-2316.
APA	Liu, Xiaokang,Peng, Kai,Chen, Ziran,Pu, Hongji,&Yu, Zhicheng.(2016).A New Capacitive Displacement Sensor With Nanometer Accuracy and Long Range.IEEE SENSORS JOURNAL,16([db:dc_citation_issue]),2306-2316.
MLA	Liu, Xiaokang,et al."A New Capacitive Displacement Sensor With Nanometer Accuracy and Long Range".IEEE SENSORS JOURNAL 16.[db:dc_citation_issue](2016):2306-2316.

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