A New Capacitive Displacement Sensor With Nanometer Accuracy and Long Range | |
Liu, Xiaokang; Peng, Kai; Chen, Ziran; Pu, Hongji; Yu, Zhicheng | |
刊名 | IEEE SENSORS JOURNAL
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2016 | |
卷号 | 16期号:[db:dc_citation_issue]页码:2306-2316 |
关键词 | capacitive sensing time grating Displacement nanometrology long range |
ISSN号 | 1530-437X |
DOI | [db:dc_identifier_doi] |
URL标识 | 查看原文 |
WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/3220478 |
专题 | 西安交通大学 |
推荐引用方式 GB/T 7714 | Liu, Xiaokang,Peng, Kai,Chen, Ziran,et al. A New Capacitive Displacement Sensor With Nanometer Accuracy and Long Range[J]. IEEE SENSORS JOURNAL,2016,16([db:dc_citation_issue]):2306-2316. |
APA | Liu, Xiaokang,Peng, Kai,Chen, Ziran,Pu, Hongji,&Yu, Zhicheng.(2016).A New Capacitive Displacement Sensor With Nanometer Accuracy and Long Range.IEEE SENSORS JOURNAL,16([db:dc_citation_issue]),2306-2316. |
MLA | Liu, Xiaokang,et al."A New Capacitive Displacement Sensor With Nanometer Accuracy and Long Range".IEEE SENSORS JOURNAL 16.[db:dc_citation_issue](2016):2306-2316. |
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