Nanocomposite Mo–V–Ag–O films were deposited on Inconel 718 by pulsed laser deposition (PLD) technique with self-prepared composite target. The effects of substrate temperatures on the growth characteristics, mechanical and tribological properties of nanocomposite films were investigated. The phase transformation, microstructure and element content of target and films were investigated by XRD and FESEM equipped with EDS, respectively. The chemical and phase changes in wear tracks were measured by Raman spectrometer. The results showed that the high ingredient uniformity of target and onset of crystallization of film occurred at substrate temperature of 400 °C. Higher substrate temperature could reduce defects and improve the crystallization and
micro-hardness of the composite films. Furthermore, the composite film showed the lowest friction coefficient about 0.24 at 500 °C which could be ascribed to the synergistic lubricating effect of vanadium oxide (VnO2n ± 1),
molybdenum oxide (MoO3) and silver vanadate (AgVO3) and the formation of lubrication glaze on the worn surfaces.