| Nanoscratching of copper surface by CeO2 | |
| Xu, Ning; Han, Weizhong; Wang, Yuchun; Li, Ju; Shan, Zhiwei | |
| 刊名 | ACTA MATERIALIA
 |
| 2017 | |
| 卷号 | 124页码:343-350 |
| 关键词 | CeO2 tip Coefficient of friction Chemical mechanical planarization Wear Nanoscratch |
| ISSN号 | 1359-6454 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2950383 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | Xu, Ning,Han, Weizhong,Wang, Yuchun,et al. Nanoscratching of copper surface by CeO2[J]. ACTA MATERIALIA,2017,124:343-350. |
| APA | Xu, Ning,Han, Weizhong,Wang, Yuchun,Li, Ju,&Shan, Zhiwei.(2017).Nanoscratching of copper surface by CeO2.ACTA MATERIALIA,124,343-350. |
| MLA | Xu, Ning,et al."Nanoscratching of copper surface by CeO2".ACTA MATERIALIA 124(2017):343-350. |
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