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	Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study
	Sun, Yu; Liu, Yilun; Chen, Xuefeng; Zhai, Zhi; Xu, Fei; Liu, Yijun
刊名	APPLIED SURFACE SCIENCE
	2017
卷号	406页码:178-185
关键词	Oxidation Thermal actuation ReaxFF MD Oxygen transport
ISSN号	0169-4332
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2946098
专题	西安交通大学
推荐引用方式 GB/T 7714	Sun, Yu,Liu, Yilun,Chen, Xuefeng,et al. Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study[J]. APPLIED SURFACE SCIENCE,2017,406:178-185.
APA	Sun, Yu,Liu, Yilun,Chen, Xuefeng,Zhai, Zhi,Xu, Fei,&Liu, Yijun.(2017).Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study.APPLIED SURFACE SCIENCE,406,178-185.
MLA	Sun, Yu,et al."Micromechanism of oxygen transport during initial stage oxidation in Si(100) surface: A ReaxFF molecular dynamics simulation study".APPLIED SURFACE SCIENCE 406(2017):178-185.

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