Detection capacitance analysis method for tuning fork micromachined gyroscope based on elastic body model | |
Jiang, T ; Wang, AL ; Jiao, JW ; Liu, GJ | |
刊名 | SENSORS AND ACTUATORS A-PHYSICAL
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2006-01-01 | |
卷号 | 128期号:1页码:52-59 |
关键词 | PIEZOCERAMIC BIMORPH PLATES ANGULAR VELOCITY INERTIAL SENSORS MEMS GYROSCOPES MICROGYROSCOPE SIMULATION WORKING |
ISSN号 | 0924-4247 |
通讯作者 | Jiang, T, Shanghai Jiao Tong Univ, Coll Mech & Energy Engn, Shanghai 200030, Peoples R China |
学科主题 | Engineering, Electrical & Electronic; Instruments & Instrumentation |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2011-11-08 |
内容类型 | 期刊论文 |
源URL | [http://ir.sim.ac.cn/handle/331004/17309] ![]() |
专题 | 上海微系统与信息技术研究所_太赫兹、微波射频技术_期刊论文 |
推荐引用方式 GB/T 7714 | Jiang, T,Wang, AL,Jiao, JW,et al. Detection capacitance analysis method for tuning fork micromachined gyroscope based on elastic body model[J]. SENSORS AND ACTUATORS A-PHYSICAL,2006,128(1):52-59. |
APA | Jiang, T,Wang, AL,Jiao, JW,&Liu, GJ.(2006).Detection capacitance analysis method for tuning fork micromachined gyroscope based on elastic body model.SENSORS AND ACTUATORS A-PHYSICAL,128(1),52-59. |
MLA | Jiang, T,et al."Detection capacitance analysis method for tuning fork micromachined gyroscope based on elastic body model".SENSORS AND ACTUATORS A-PHYSICAL 128.1(2006):52-59. |
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