Detection capacitance analysis method for tuning fork micromachined gyroscope based on elastic body model

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	Detection capacitance analysis method for tuning fork micromachined gyroscope based on elastic body model
	Jiang, T ; Wang, AL ; Jiao, JW ; Liu, GJ
刊名	SENSORS AND ACTUATORS A-PHYSICAL
	2006-01-01
卷号	128 期号:1 页码:52-59
关键词	PIEZOCERAMIC BIMORPH PLATES ANGULAR VELOCITY INERTIAL SENSORS MEMS GYROSCOPES MICROGYROSCOPE SIMULATION WORKING
ISSN号	0924-4247
通讯作者	Jiang, T, Shanghai Jiao Tong Univ, Coll Mech & Energy Engn, Shanghai 200030, Peoples R China
学科主题	Engineering, Electrical & Electronic; Instruments & Instrumentation
收录类别	SCI
语种	英语
公开日期	2011-11-08
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/17309]
专题	上海微系统与信息技术研究所_太赫兹、微波射频技术_期刊论文
推荐引用方式 GB/T 7714	Jiang, T,Wang, AL,Jiao, JW,et al. Detection capacitance analysis method for tuning fork micromachined gyroscope based on elastic body model[J]. SENSORS AND ACTUATORS A-PHYSICAL,2006,128(1):52-59.
APA	Jiang, T,Wang, AL,Jiao, JW,&Liu, GJ.(2006).Detection capacitance analysis method for tuning fork micromachined gyroscope based on elastic body model.SENSORS AND ACTUATORS A-PHYSICAL,128(1),52-59.
MLA	Jiang, T,et al."Detection capacitance analysis method for tuning fork micromachined gyroscope based on elastic body model".SENSORS AND ACTUATORS A-PHYSICAL 128.1(2006):52-59.