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	Numerical simulation and experimental study of surface waviness during full aperture rapid planar polishing
	Xie, Ruiqing; Zhao, Shijie; Liao, Defeng; Chen, Xianhua; Wang, Jian; Xu, Qiao; Zhao, Huiying; Jiang, Zhuangde
刊名	INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
	2018
卷号	97页码:3273-3282
关键词	Full aperture polishing Numerical simulation Optical components Power spectral density Surface waviness
ISSN号	0268-3768
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2922405
专题	西安交通大学
推荐引用方式 GB/T 7714	Xie, Ruiqing,Zhao, Shijie,Liao, Defeng,et al. Numerical simulation and experimental study of surface waviness during full aperture rapid planar polishing[J]. INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY,2018,97:3273-3282.
APA	Xie, Ruiqing.,Zhao, Shijie.,Liao, Defeng.,Chen, Xianhua.,Wang, Jian.,...&Jiang, Zhuangde.(2018).Numerical simulation and experimental study of surface waviness during full aperture rapid planar polishing.INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY,97,3273-3282.
MLA	Xie, Ruiqing,et al."Numerical simulation and experimental study of surface waviness during full aperture rapid planar polishing".INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY 97(2018):3273-3282.

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