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	Preparation and characterization of lead zirconate titanate thin films grown by RF magnetron sputtering for pyroelectric infrared detector arrays
	Zhao, Huifeng; Liu, Xuesen; Ren, Wei; Zhang, Yijun
刊名	Ceramics International
	2018
卷号	44页码:S7-S10
关键词	Lead zirconate titanate thin films Micro electromechanical system (MEMS) Pyroelectric coefficients Pyroelectric infrared detector arrays Pyroelectric properties PZT thin film Remnant polarizations rf-Magnetron sputtering
ISSN号	0272-8842
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2917866
专题	西安交通大学
推荐引用方式 GB/T 7714	Zhao, Huifeng,Liu, Xuesen,Ren, Wei,et al. Preparation and characterization of lead zirconate titanate thin films grown by RF magnetron sputtering for pyroelectric infrared detector arrays[J]. Ceramics International,2018,44:S7-S10.
APA	Zhao, Huifeng,Liu, Xuesen,Ren, Wei,&Zhang, Yijun.(2018).Preparation and characterization of lead zirconate titanate thin films grown by RF magnetron sputtering for pyroelectric infrared detector arrays.Ceramics International,44,S7-S10.
MLA	Zhao, Huifeng,et al."Preparation and characterization of lead zirconate titanate thin films grown by RF magnetron sputtering for pyroelectric infrared detector arrays".Ceramics International 44(2018):S7-S10.

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