| Study on film resistivity of Energy Conversion Components for MEMS Initiating Explosive Device | |
| Ren, Wei; Zhang, Bin; Zhao, Yulong; Chu, Enyi; Yin, Ming; Li, Hui; Wang, Kexuan | |
| 2018 | |
| 关键词 | MEMS energy conversion component resistivity Scale effect |
| 卷号 | 986 |
| 页码 | 9 |
| 会议录 | 19TH ANNUAL CONFERENCE AND 8TH INTERNATIONAL CONFERENCE OF CHINESE SOCIETY OF MICRO/NANO TECHNOLOGY (CSMNT2017)
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| URL标识 | 查看原文 |
| ISSN号 | 1742-6588 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2917659 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | Ren, Wei,Zhang, Bin,Zhao, Yulong,et al. Study on film resistivity of Energy Conversion Components for MEMS Initiating Explosive Device[C]. 见:. |
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