Study of metal organic chemical vapor deposition TiN thin films in real structures

	Study of metal organic chemical vapor deposition TiN thin films in real structures
	Yi, LW ; Wenjie, ZJ ; Wu, J
刊名	THIN SOLID FILMS
	2006-01-01
卷号	515 期号:4 页码:2803-2806
关键词	PLASMA TREATMENT TITANIUM NITRIDE INTEGRATION EVOLUTION
ISSN号	0040-6090
通讯作者	Yi, LW, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China
学科主题	Materials Science, Multidisciplinary; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter
收录类别	SCI
语种	英语
公开日期	2011-11-09
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/17505]
专题	上海微系统与信息技术研究所_化学研究_期刊论文
推荐引用方式 GB/T 7714	Yi, LW,Wenjie, ZJ,Wu, J. Study of metal organic chemical vapor deposition TiN thin films in real structures[J]. THIN SOLID FILMS,2006,515(4):2803-2806.
APA	Yi, LW,Wenjie, ZJ,&Wu, J.(2006).Study of metal organic chemical vapor deposition TiN thin films in real structures.THIN SOLID FILMS,515(4),2803-2806.
MLA	Yi, LW,et al."Study of metal organic chemical vapor deposition TiN thin films in real structures".THIN SOLID FILMS 515.4(2006):2803-2806.