Study of metal organic chemical vapor deposition TiN thin films in real structures | |
Yi, LW ; Wenjie, ZJ ; Wu, J | |
刊名 | THIN SOLID FILMS
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2006-01-01 | |
卷号 | 515期号:4页码:2803-2806 |
关键词 | PLASMA TREATMENT TITANIUM NITRIDE INTEGRATION EVOLUTION |
ISSN号 | 0040-6090 |
通讯作者 | Yi, LW, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Shanghai 200050, Peoples R China |
学科主题 | Materials Science, Multidisciplinary; Materials Science, Coatings & Films; Physics, Applied; Physics, Condensed Matter |
收录类别 | SCI |
语种 | 英语 |
公开日期 | 2011-11-09 |
内容类型 | 期刊论文 |
源URL | [http://ir.sim.ac.cn/handle/331004/17505] ![]() |
专题 | 上海微系统与信息技术研究所_化学研究_期刊论文 |
推荐引用方式 GB/T 7714 | Yi, LW,Wenjie, ZJ,Wu, J. Study of metal organic chemical vapor deposition TiN thin films in real structures[J]. THIN SOLID FILMS,2006,515(4):2803-2806. |
APA | Yi, LW,Wenjie, ZJ,&Wu, J.(2006).Study of metal organic chemical vapor deposition TiN thin films in real structures.THIN SOLID FILMS,515(4),2803-2806. |
MLA | Yi, LW,et al."Study of metal organic chemical vapor deposition TiN thin films in real structures".THIN SOLID FILMS 515.4(2006):2803-2806. |
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