| The experimental research on uniformity of argon inductively coupled plasma at different cylinder heights | |
| Wang, Songbai; Zhang, Xianhui; Wang, Hongzhe; Liu, Linying; Zhou, Renwu; Yang, Size; Liu, Dongping | |
| 2013 | |
| 关键词 | physical characteristic uniformity argon ICP plasma potential electron temperature Langmuir probe electron density |
| 卷号 | 724-725 |
| 页码 | 686-+ |
| 会议录 | APPLIED ENERGY TECHNOLOGY, PTS 1 AND 2
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| URL标识 | 查看原文 |
| ISSN号 | 1022-6680 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/2901327 |
| 专题 | 福州大学 |
| 推荐引用方式 GB/T 7714 | Wang, Songbai,Zhang, Xianhui,Wang, Hongzhe,et al. The experimental research on uniformity of argon inductively coupled plasma at different cylinder heights[C]. 见:. |
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