Effects of Substrate Temperature and Sputtering Power on the Optical and Electrical Properties of Al-doped Zinc Oxide Thin Films by Reactive RF Magnetron Sputtering | |
Lin, Peijie; Lai, Yunfeng; Ding, Xiaoqin; Cheng, Shuying | |
2015 | |
卷号 | 46 |
页码 | 1117-1122 |
会议录 | IAEDS15: INTERNATIONAL CONFERENCE IN APPLIED ENGINEERING AND MANAGEMENT
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URL标识 | 查看原文 |
ISSN号 | 1974-9791 |
内容类型 | 会议论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2896867 |
专题 | 福州大学 |
推荐引用方式 GB/T 7714 | Lin, Peijie,Lai, Yunfeng,Ding, Xiaoqin,et al. Effects of Substrate Temperature and Sputtering Power on the Optical and Electrical Properties of Al-doped Zinc Oxide Thin Films by Reactive RF Magnetron Sputtering[C]. 见:. |
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