Saturation Ion Current Densities in Inductively Coupled Hydrogen Plasma Produced by Large-Power Radio Frequency Generator | |
Wang Songbai; Lei Guangjiu; Bi Zhenhua; Ghomi, H.; Yang Size; Liu Dongping | |
刊名 | PLASMA SCIENCE & TECHNOLOGY
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2016 | |
卷号 | 18页码:907-911 |
关键词 | large-power RF generator H- ion transformer model saturation ion current densities outer/inner puffing gas pressure ratio |
ISSN号 | 1009-0630 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2894914 |
专题 | 福州大学 |
推荐引用方式 GB/T 7714 | Wang Songbai,Lei Guangjiu,Bi Zhenhua,et al. Saturation Ion Current Densities in Inductively Coupled Hydrogen Plasma Produced by Large-Power Radio Frequency Generator[J]. PLASMA SCIENCE & TECHNOLOGY,2016,18:907-911. |
APA | Wang Songbai,Lei Guangjiu,Bi Zhenhua,Ghomi, H.,Yang Size,&Liu Dongping.(2016).Saturation Ion Current Densities in Inductively Coupled Hydrogen Plasma Produced by Large-Power Radio Frequency Generator.PLASMA SCIENCE & TECHNOLOGY,18,907-911. |
MLA | Wang Songbai,et al."Saturation Ion Current Densities in Inductively Coupled Hydrogen Plasma Produced by Large-Power Radio Frequency Generator".PLASMA SCIENCE & TECHNOLOGY 18(2016):907-911. |
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