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	Saturation Ion Current Densities in Inductively Coupled Hydrogen Plasma Produced by Large-Power Radio Frequency Generator
	Wang Songbai; Lei Guangjiu; Bi Zhenhua; Ghomi, H.; Yang Size; Liu Dongping
刊名	PLASMA SCIENCE & TECHNOLOGY
	2016
卷号	18页码:907-911
关键词	large-power RF generator H- ion transformer model saturation ion current densities outer/inner puffing gas pressure ratio
ISSN号	1009-0630
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2894914
专题	福州大学
推荐引用方式 GB/T 7714	Wang Songbai,Lei Guangjiu,Bi Zhenhua,et al. Saturation Ion Current Densities in Inductively Coupled Hydrogen Plasma Produced by Large-Power Radio Frequency Generator[J]. PLASMA SCIENCE & TECHNOLOGY,2016,18:907-911.
APA	Wang Songbai,Lei Guangjiu,Bi Zhenhua,Ghomi, H.,Yang Size,&Liu Dongping.(2016).Saturation Ion Current Densities in Inductively Coupled Hydrogen Plasma Produced by Large-Power Radio Frequency Generator.PLASMA SCIENCE & TECHNOLOGY,18,907-911.
MLA	Wang Songbai,et al."Saturation Ion Current Densities in Inductively Coupled Hydrogen Plasma Produced by Large-Power Radio Frequency Generator".PLASMA SCIENCE & TECHNOLOGY 18(2016):907-911.

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