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	Graph-Based Redundant Via Insertion and Guiding Template Assignment for DSA-MP
	Li, Xingquan; Yu, Bei; Ou, Jiaojiao; Chen, Jianli; Pan, David Z.; Zhu, Wenxing
刊名	IEEE TRANSACTIONS ON VERY LARGE SCALE INTEGRATION (VLSI) SYSTEMS
	2018
卷号	26页码:2504-2517
关键词	multiplet redundant via insertion (RVI) multiple patterning (MP) Constrained maximum-independent set directed self-assembly (DSA)
ISSN号	1063-8210
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2888614
专题	福州大学
推荐引用方式 GB/T 7714	Li, Xingquan,Yu, Bei,Ou, Jiaojiao,et al. Graph-Based Redundant Via Insertion and Guiding Template Assignment for DSA-MP[J]. IEEE TRANSACTIONS ON VERY LARGE SCALE INTEGRATION (VLSI) SYSTEMS,2018,26:2504-2517.
APA	Li, Xingquan,Yu, Bei,Ou, Jiaojiao,Chen, Jianli,Pan, David Z.,&Zhu, Wenxing.(2018).Graph-Based Redundant Via Insertion and Guiding Template Assignment for DSA-MP.IEEE TRANSACTIONS ON VERY LARGE SCALE INTEGRATION (VLSI) SYSTEMS,26,2504-2517.
MLA	Li, Xingquan,et al."Graph-Based Redundant Via Insertion and Guiding Template Assignment for DSA-MP".IEEE TRANSACTIONS ON VERY LARGE SCALE INTEGRATION (VLSI) SYSTEMS 26(2018):2504-2517.

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