An off-line roughness evaluation software and its application in quantitative calculation of wiggling based on low frequency power spectrum density method

	An off-line roughness evaluation software and its application in quantitative calculation of wiggling based on low frequency power spectrum density method
	Zhao LJ(赵利俊); Zhang LB(张利斌); Dong LS(董立松); Su XJ(苏晓菁); Liu YS(刘艳松); Wei YY(韦亚一)
	2017-05-08
文献子类	会议论文
内容类型	会议论文
源URL	[http://159.226.55.106/handle/172511/18272]
专题	微电子研究所_集成电路先导工艺研发中心
作者单位	中国科学院微电子研究所
推荐引用方式 GB/T 7714	Zhao LJ,Zhang LB,Dong LS,et al. An off-line roughness evaluation software and its application in quantitative calculation of wiggling based on low frequency power spectrum density method[C]. 见:.