Design, Fabrication, and Characterization of a 240 x240 MEMS Uncooled I nfrared Focal Plane Array With 42um Pitch Pixels | |
Li ZG(李志刚)![]() ![]() | |
刊名 | IEEE Journal of Microelectromechanical Systems.
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2013-03-29 | |
公开日期 | 2014-10-30 |
内容类型 | 期刊论文 |
源URL | [http://10.10.10.126/handle/311049/12060] ![]() |
专题 | 微电子研究所_集成电路先导工艺研发中心 |
通讯作者 | Ou Y(欧毅) |
作者单位 | 中国科学院微电子研究所 |
推荐引用方式 GB/T 7714 | Li ZG,Ou Y,Dong FL. Design, Fabrication, and Characterization of a 240 x240 MEMS Uncooled I nfrared Focal Plane Array With 42um Pitch Pixels[J]. IEEE Journal of Microelectromechanical Systems.,2013. |
APA | Li ZG,Ou Y,&Dong FL.(2013).Design, Fabrication, and Characterization of a 240 x240 MEMS Uncooled I nfrared Focal Plane Array With 42um Pitch Pixels.IEEE Journal of Microelectromechanical Systems.. |
MLA | Li ZG,et al."Design, Fabrication, and Characterization of a 240 x240 MEMS Uncooled I nfrared Focal Plane Array With 42um Pitch Pixels".IEEE Journal of Microelectromechanical Systems. (2013). |
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