Design, Fabrication, and Characterization of a 240 x240 MEMS Uncooled I nfrared Focal Plane Array With 42um Pitch Pixels

	Design, Fabrication, and Characterization of a 240 x240 MEMS Uncooled I nfrared Focal Plane Array With 42um Pitch Pixels
	Li ZG(李志刚); Ou Y(欧毅); Dong FL(董凤良)
刊名	IEEE Journal of Microelectromechanical Systems.
	2013-03-29
公开日期	2014-10-30
内容类型	期刊论文
源URL	[http://10.10.10.126/handle/311049/12060]
专题	微电子研究所_集成电路先导工艺研发中心
通讯作者	Ou Y(欧毅)
作者单位	中国科学院微电子研究所
推荐引用方式 GB/T 7714	Li ZG,Ou Y,Dong FL. Design, Fabrication, and Characterization of a 240 x240 MEMS Uncooled I nfrared Focal Plane Array With 42um Pitch Pixels[J]. IEEE Journal of Microelectromechanical Systems.,2013.
APA	Li ZG,Ou Y,&Dong FL.(2013).Design, Fabrication, and Characterization of a 240 x240 MEMS Uncooled I nfrared Focal Plane Array With 42um Pitch Pixels.IEEE Journal of Microelectromechanical Systems..
MLA	Li ZG,et al."Design, Fabrication, and Characterization of a 240 x240 MEMS Uncooled I nfrared Focal Plane Array With 42um Pitch Pixels".IEEE Journal of Microelectromechanical Systems. (2013).