Infrared camera based on optical-readout bi-material FPA | |
Jiao BB(焦斌斌) | |
2011-09-08 | |
英文摘要 | "With the trend of developments of infrared-focal plane array (FPA) which is particularly pronounced in many applications, in this paper, we demonstrated an uncooled infrared (8?14μm) camera based on the optically read-out Bi-material Infrared FPA. We reported on the fabrication and characterization of arrays of bimaterial microcantilevers. On the basis of opto-mechanical effect and micro electromechanical system (MEMS) technology, a substrate-free FPA with the thermal isolated structure SiNx and Au for uncooled infrared imaging is developed, with 49.5μm×49.5μm of the pixel and 240×240 array, moreover, the camera had an average noise equivalent temperature difference (NETD) and a response time of 100mK and 100ms at 7Pa atmospheric pressure, respectively. " |
会议录 | Proc. SPIE
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内容类型 | 会议论文 |
源URL | [http://10.10.10.126/handle/311049/9533] ![]() |
专题 | 微电子研究所_集成电路先导工艺研发中心 |
推荐引用方式 GB/T 7714 | Jiao BB. Infrared camera based on optical-readout bi-material FPA[C]. 见:. |
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