Infrared camera based on optical-readout bi-material FPA

	Infrared camera based on optical-readout bi-material FPA
	Jiao BB(焦斌斌)
	2011-09-08
英文摘要	"With the trend of developments of infrared-focal plane array (FPA) which is particularly pronounced in many applications, in this paper, we demonstrated an uncooled infrared (8？14μm) camera based on the optically read-out Bi-material Infrared FPA. We reported on the fabrication and characterization of arrays of bimaterial microcantilevers. On the basis of opto-mechanical effect and micro electromechanical system (MEMS) technology, a substrate-free FPA with the thermal isolated structure SiNx and Au for uncooled infrared imaging is developed, with 49.5μm×49.5μm of the pixel and 240×240 array, moreover, the camera had an average noise equivalent temperature difference (NETD) and a response time of 100mK and 100ms at 7Pa atmospheric pressure, respectively. "
会议录	Proc. SPIE
内容类型	会议论文
源URL	[http://10.10.10.126/handle/311049/9533]
专题	微电子研究所_集成电路先导工艺研发中心
推荐引用方式 GB/T 7714	Jiao BB. Infrared camera based on optical-readout bi-material FPA[C]. 见:.