Modified Deal-Grove model for the thermal oxidation of Ge and Al2O3 capped Ge

	Modified Deal-Grove model for the thermal oxidation of Ge and Al2O3 capped Ge
	Wang SK(王盛凯); Wang XL(王晓磊); Han L(韩乐); Liu HG(刘洪刚)
刊名	Extended Abstracts of the 2013 International Conference on Solid State Devices and Materials
	2013-09-27
公开日期	2014-10-27
内容类型	期刊论文
源URL	[http://10.10.10.126/handle/311049/11920]
专题	微电子研究所_高频高压器件与集成研发中心
通讯作者	Liu HG(刘洪刚)
推荐引用方式 GB/T 7714	Wang SK,Wang XL,Han L,et al. Modified Deal-Grove model for the thermal oxidation of Ge and Al2O3 capped Ge[J]. Extended Abstracts of the 2013 International Conference on Solid State Devices and Materials,2013.
APA	王盛凯,王晓磊,韩乐,&刘洪刚.(2013).Modified Deal-Grove model for the thermal oxidation of Ge and Al2O3 capped Ge.Extended Abstracts of the 2013 International Conference on Solid State Devices and Materials.
MLA	王盛凯,et al."Modified Deal-Grove model for the thermal oxidation of Ge and Al2O3 capped Ge".Extended Abstracts of the 2013 International Conference on Solid State Devices and Materials (2013).