一种用于室温检测的NO2气体传感器的制作方法
李冬梅; 詹爽; 梁圣法; 陈鑫; 谢常青; 刘明
2017-02-07
著作权人中国科学院微电子研究所
专利号US9562884
国家美国
文献子类发明专利
英文摘要

A method for manufacturing an NO.sub.2 gas sensor for detection at room temperature comprises: manufacturing a metal electrode on a surface of a flexible substrate; manufacturing an SWCNTs/SnO.sub.2 sensitive film; and bonding the SWCNTs/SnO.sub.2 sensitive film with a portion of the surface of the flexible substrate with the metal electrode, so as to form the NO.sub.2 gas sensor for detection at room temperature. The present disclosure solves the problems of the poor adhesion between the sensitive material and the flexible substrate, and a non-uniform distribution, and achieves the purposes of secure bonding between the sensitive material and the flexible substrate, and uniform distribution.

公开日期2014-12-11
申请日期2013-06-05
语种中文
内容类型专利
源URL[http://159.226.55.106/handle/172511/18223]  
专题微电子研究所_微电子器件与集成技术重点实验室
作者单位中国科学院微电子研究所
推荐引用方式
GB/T 7714
李冬梅,詹爽,梁圣法,等. 一种用于室温检测的NO2气体传感器的制作方法. US9562884. 2017-02-07.
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