一种用于室温检测的NO2气体传感器的制作方法 | |
李冬梅![]() ![]() ![]() ![]() | |
2017-02-07 | |
著作权人 | 中国科学院微电子研究所 |
专利号 | US9562884 |
国家 | 美国 |
文献子类 | 发明专利 |
英文摘要 | A method for manufacturing an NO.sub.2 gas sensor for detection at room temperature comprises: manufacturing a metal electrode on a surface of a flexible substrate; manufacturing an SWCNTs/SnO.sub.2 sensitive film; and bonding the SWCNTs/SnO.sub.2 sensitive film with a portion of the surface of the flexible substrate with the metal electrode, so as to form the NO.sub.2 gas sensor for detection at room temperature. The present disclosure solves the problems of the poor adhesion between the sensitive material and the flexible substrate, and a non-uniform distribution, and achieves the purposes of secure bonding between the sensitive material and the flexible substrate, and uniform distribution. |
公开日期 | 2014-12-11 |
申请日期 | 2013-06-05 |
语种 | 中文 |
内容类型 | 专利 |
源URL | [http://159.226.55.106/handle/172511/18223] ![]() |
专题 | 微电子研究所_微电子器件与集成技术重点实验室 |
作者单位 | 中国科学院微电子研究所 |
推荐引用方式 GB/T 7714 | 李冬梅,詹爽,梁圣法,等. 一种用于室温检测的NO2气体传感器的制作方法. US9562884. 2017-02-07. |
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